水浴对MoS2薄膜结构及摩擦学性能影响的研究

为考察水介质对二硫化钼(MoS2)薄膜结构和摩擦学性能的影响，采用沸腾蒸馏水对溅射MoS2薄膜进行水浴处理，并对水浴处理前后薄膜的微观结构、摩擦学性能进行了研究. 研究发现，薄膜中同时存在晶体结构和非晶结构. 随着水浴处理时间的延长，XRD分析结果中观察到薄膜中非晶相减少，微晶相增加，同时晶粒尺寸先减小后增大. 另外，薄膜的枝状晶上产生了更多的细小枝状晶. 薄膜中的残余应力也随水浴时间延长而发生明显变化. 薄膜的摩擦学性能受到水浴的明显影响，当水浴处理时间为20 min时，MoS2薄膜的耐磨寿命达到未水浴处理薄膜的约2倍. 分析认为，水浴处理导致溅射MoS2薄膜内应力、组织结构和晶体结构的变化，引起了其摩擦学性能的变化.

To investigate the effect of aqueous medium on the structure and tribological properties of molybdenum disulfide (MoS₂) thin films, sputtered MoS₂ thin films were treated via water bath with boiling distilled water, and the microstructure and tribological properties of the films before and after the treatment were studied. It was found that both crystalline and amorphous structures coexisted in the films. As the water bath treatment time increased, XRD analysis showed that the amorphous phase in the films decreased while the microcrystalline phase increased, and the grain size first decreased and then increased. Additionally, more fine dendritic crystals formed on the existing dendritic crystals of the films. The residual stress in the films also changed significantly with prolonged water bath treatment time. The tribological properties of the films were notably affected by the water bath treatment: when the treatment time was 20 min, the wear resistance lifetime of the MoS₂ thin films reached approximately twice that of the untreated films. Analysis suggests that the water bath treatment induced changes in the internal stress, microstructure and crystal structure of the sputtered MoS₂ thin films, thereby leading to the alterations in their tribological properties.