Data underlying the publication: In situ reflectometry and diffraction investigation of the multiscale structure of p-type polysilicon passivating contacts for c-Si solar cells

Data corresponding to the publication 'In situ reflectometry and diffraction investigation of the multiscale structure of p-type polysilicon passivating contacts for c-Si solar cells' in ACS Applied Materials and Interfaces. The data are composed of X-ray reflectometry (XRR), Grazing Incidence X-ray diffraction (GIXRD) and lifetime measurements of passivating contacts for c-Si solar cells.