The microDelta: Downscaling robot mechanisms enables ultra-fast and high precision movement

Physical scaling laws predict that miniaturization of robotic mechanisms should enable exceptional robot performance on metrics such as speed and precision. While these scaling laws have been explored in a variety of microsystems, the benefits and limitations of downscaling 3D robotic mechanisms have yet to be assessed due to limitations in microscale 3D manufacturing. In this work, we use the Delta robot as a case study for these scaling laws. We present two sizes of 3D-printed Delta robots, the microDeltas, measuring 1.4 mm and 0.7 mm in height, which are the smallest and fastest Delta robots ever demonstrated. 3D printing with two-photon polymerization and subsequent metallization enabled the miniaturization of these 3D robotic parallel mechanisms integrated with electrostatic actuators for exceptionally high bandwidths. The smallest microDelta was able to operate at over 1000 Hz and achieved precisions of less than 1 µm by taking advantage of its small size. The microDelta's relativ..., , # microDelta data & code repository (Dryad package)

**Dataset DOI:** 10.5061/dryad.7pvmcvf56\
**Manuscript:** *The microDelta: downscaling robot mechanisms enables ultra-fast and high precision movement* (Science Robotics)

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## Usage Notes — file types in this Dryad package

The submission currently includes the following file types:

| Extension | What it is | How to open / use | Typical role in this package |
| --------- | -----------------------------------------------...,