Spectroscopic ellipsometry mapping of PAAO:DLC:Ag (AJ-7-03-31-DLCAg sample)
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Spectroscopic ellipsometry measurement data obtained from the porous anodized aluminum oxide (PAAO) covered with hydrogenated amorphous diamond-like carbon and silver (DLC:Ag) nanocomposite. The sample was made by 2 processes: (1) anodization of aluminum polycrystal in 0.3 mol/L oxalic acid at 40 V for 4 minutes and 35 seconds and then (2) depositing DLC:Ag employing reactive unbalanced magnetron sputtering in direct current mode using silver target (80 sccm argon gas flow, 5.4 sccm C<sub>2</sub>H<sub>2</sub> gas flow, 405 V voltage, 0.09-0.10 A current, 7·10<sup>-3</sup> mbar work pressure, 2 minutes 32 seconds process duration). The measurements were carried out at 20 × 20 locations covering all of the sample surface (approximately 4.8 × 4.8 mm<sup>2</sup>). The coordinates of each of 400 locations are available in "mapping_points.csv" file. All measurement data is also included in a single "AJ-7-03-31-DLCAg Ellipsometry Mapping Measurements.rar" file. Ellipsometer: rotating compensator GES5-E (Semilab). Light source: 75 W xenon short arc lamp with 185-2000 nm wavelength spectrum. Detector: UV-Vis CCD with 0.8 nm resolution. Spectral range: approximately 230-960 nm. Light incidence angles: 55°, 60°, 65°, 70°, 75°. Light beam size: microspot (365 × 470 μm<sup>2</sup> at 75° angle of incidence). The same sample was also measured using the same spectroscopic ellipsometry method before being covered with DLC:Ag. The data can be found here: https://doi.org/10.5281/zenodo.7053393
