STM, LEED and DFT atomic coordinate data of HEA Cantor alloy

STM topographic images are calibrated with an offset background subtraction performed, then cropped from an atomic resolution STM image. The atomic positions are fit using the atomic positions of the FFT-filtered topographic image, filtering only the Bragg peaks. At each fitted position, the STM's perceived atomic height is measured and compared to density functional theory (DFT) calculations.Direct measurement of the observed LEED spots in the LEED photo are used to calculate the atom-atom distance of the surface using an approximate working distance of 75mm, measured at 63eV.Atomic coordinates of a DFT slab calculation for partial density of states of each atom