Date for manuscript: Spectroscopic and Electrical Insights into Humidity-Induced Modifications of Graphene Structures

Title of dataset: Data for the manuscript "Spectroscopic and Electrical Insights into Humidity-Induced Modifications of Graphene Structures"Name/institution/contact information: Dinara Sobola/IPM AV CR/[e-mail] Papež/FEKT Department of Physics VUT/[e-mail] Kaspar/FEKT Department of Physics VUT/[e-mail] collection date: from 1.12.2024 Figure 1.png: Schematic of the SEM–ESEM experimental setup used for humidity-controlled electrical measurements. The configuration includes a turbomolecular pumping system, proportional isolation valve (CIV), controlled water vapor inlet regulated by a needle valve controller (NVC), chamber pressure monitoring, and the positioning of the graphene device inside the SEM chamber for in situ resistance measurements under low-vacuum ESEM conditions. Made in Paint. Figure 2. SEM image of the tested sensor.png: SEM image of the tested sensor made by A FEI Quattro SEM microscope in FEI native software. The unit: mkm Figure 3a. Raman spectra.txt: Data to the Figure 3a, captured by WITec alpha300 R system. Units: relative intensity (a.u.) and wavenumber (cm-1) Figure 3b.png: Raman of the 2680 cm-1 peak distribution made by WITec alpha300 R system and processed by Project software. Figure 4. FTIR.txt: Data to Figure 4. FTIR spectrum of the sample before and after H2O exposure made by Hyperion 3000 KIT in reflection mode by 15x objective with a spectral resolution of 4 cm⁻1, by averaging 512 scans. Figure 5-7. KPFM before H2O.txt: Raw KPFM data used for preparation of figure 5a (KPFM map); figure 6a (work function map) and figure 7a (gradient map). All images represents matrix 256x256 pixels with real size of image 60x60mkm. Figure 5-7. KPFM before after H2O.txt: Raw KPFM data used for preparation of figure 5b (KPFM map); figure 6b (work function map) and figure 7b (gradient map). All images represents matrix 256x256 pixels with real size of image 60x60mkm. Figure 8 and 9. Raw data of transfer_characteristics_ambient_conditions.csv: Gate-dependent transfer characteristics of the graphene device measured under ambient conditions and after water vapor exposure: (Figure 8a) resistivity versus gate voltage, (Figure 8b) drain current versus gate voltage, measured at different drain biases (600–1000 mV). A systematic shift of the Dirac point toward higher gate voltages is observed after humidity exposure. Figure 8 and 9. Raw data of transfer_characteristics_resistivity_ambient_conditions.csv:I-V characteristics of graphene-based devices before and after water vapor exposure, showing (Figure 9a) linear and hysteresis-free behavior, (Figure 9b) dependence of the resistance on channel width of different samples before and after exposure and (Figure 9c) normalized resistance change (ΔR/R₀ × 100) as a function of channel width, where R₀ corresponds to the resistance measured under clean dry conditions. Figure 8 and 9. Raw data of transfer_characteristics_resistivity_water_vapour.csv: I-V characteristics of graphene-based devices before and after water vapor exposure, showing (Figure 9a) linear and hysteresis-free behavior, (Figure 9b) dependence of the resistance on channel width of different samples before and after exposure and (Figure 9c) normalized resistance change (ΔR/R₀ × 100) as a function of channel width, where R₀ corresponds to the resistance measured under clean dry conditions. Figure 8 and 9. Raw data of transfer_characteristics_water_vapours.csv: Gate-dependent transfer characteristics of the graphene device measured under ambient conditions and after water vapor exposure: (Figure 8a) resistivity versus gate voltage, (Figure 8b) drain current versus gate voltage, measured at different drain biases (600–1000 mV). A systematic shift of the Dirac point toward higher gate voltages is observed after humidity exposure. Figure10. In-situ test of graphene sensor.csv: Dynamics of H2O detection under controlled pressure. Units: Pressure (Pa), resistivity (Ohm), time (h:m:s). File formats: *.txt, *.csv, *.png