Data underlying the publication Application of a dual-thermopile radical probe to expanding hydrogen plasmas
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<br> Publication information: Title: Data underlying the publication Application of a dual-thermopile radical probe to expanding hydrogen plasmas Authors: Shih-Chi Wang, Ruud van der Horst, Maarten van Kampen, and Thomas W. Morgan Corresponding author: Shih-Chi Wang Corresponding ORCID: 0000-0002-1892-5285 Corresponding email address: s.c.wang@differ.nl Organizations: DIFFER - Dutch Institute for Fundamental Energy Research and ASML Journal: Plasma Sources Science and Technology Keywords: cascaded arc source, heat flux sensor, hydrogen plasma, plasma-material processing, radical probe Resource title: Application of a dual-thermopile radical probe to expanding hydrogen plasmas Resource DOI: https://doi.org/10.1088/1361-6595/ac71c3 <br> Description: This publication concerns experimental work on plasma diagnostics, and the research objective is to measure hydrogen radical flux using a dual-thermopile radical probe. The data collection was carried out by a McPherson 234/302 with 3mm thick MgF2 window, a Keithley 2410 SourceMeter, and a GraphTec midi logger GL200A. The collected data is series of numbers and is plotted in the multiple figures of the publication. This replication package contains multiple folders, each of which corresponds to a figure in the publication. <br> Creation date: 31-May-2022 <br> Access right: open access <br> File formats: text file (.txt), excel sheet (.xlsx), and portable network graphics (.png). <br> Software version: Anaconda3-2019.10 <br> Hardware version: Intel(R) Core(TM) i7-8650U CPU, RAM 8.0 GB <br>
出版信息：
数据集标题：支撑论文《双热电堆自由基探针（dual-thermopile radical probe）在膨胀氢等离子体中的应用》的相关数据
作者：王仕祺、Ruud van der Horst、Maarten van Kampen、Thomas W. Morgan
通讯作者：王仕祺
通讯作者ORCID：0000-0002-1892-5285
通讯邮箱：s.c.wang@differ.nl
所属机构：荷兰基础能源研究所（DIFFER）与ASML公司
刊载期刊：《Plasma Sources Science and Technology》（等离子体源科学与技术）
关键词：级联电弧源、热流传感器、氢等离子体、等离子体-材料加工、自由基探针
资源标题：双热电堆自由基探针在膨胀氢等离子体中的应用
资源DOI：https://doi.org/10.1088/1361-6595/ac71c3
数据集说明：本出版物围绕等离子体诊断领域的实验研究展开，研究目标为采用双热电堆自由基探针测量氢自由基通量。数据采集使用搭载3mm厚氟化镁（MgF₂）窗口的McPherson 234/302设备、吉时利2410型源测量单元（SourceMeter）及GraphTec midi logger GL200A型数据记录仪完成。所采集的数据为一系列数值，并被绘制成该出版物中的多幅图表。本复现包包含多个文件夹，每个文件夹对应出版物中的一幅图表。
创建日期：2022年5月31日
访问权限：开放获取
文件格式：文本文件（.txt）、Excel工作表（.xlsx）以及便携式网络图形文件（.png）
软件版本：Anaconda3-2019.10
硬件配置：Intel(R) Core(TM) i7-8650U CPU，内存8.0GB
提供机构：
van Kampen, Maarten; Wang, Shih-Chi
创建时间：
2022-05-31
