Improving the performance of Mo/Si/C multilayers through selective substrate bias-assistance
收藏科学数据银行2025-10-22 更新2026-04-23 收录
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https://www.scidb.cn/detail?dataSetId=884a553accc94f6dab6ab1ed842b2c21
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资源简介：
Mo/Si/C multilayers were fabricated with bias applied to different layers under the same conditions. The results demonstrate that bias significantly reduces surface and interfacial roughness, with effective improvements observed for each material.
提供机构：
Meiping Zhu; Wenjie Xu; Hongxuan Song; Longxun Cao; Wenyun Du; Zhenqi Lu; Jianda Shao
创建时间：
2025-10-22
