The data of deposition rates for pulse sputtering conditions
收藏DataCite Commons2025-08-06 更新2026-04-25 收录
下载链接：
https://figshare.com/articles/dataset/The_data_of_deposition_rates_for_pulse_sputtering_conditions/29834834/1
下载链接
链接失效反馈官方服务：
资源简介：
The table contains process parameters data for operating a gas aggregation nanoparticle source. The data include the aggregation chamber pressure, the mean power delivered to the magnetron, the frequency and pulse length of a discharge, and the obtained deposition rate of nanoparticles.
提供机构：
figshare
创建时间：
2025-08-06
