Random Phase Plate Designed by Genetic Algorithm for Decoherence in Energy Homogenization Units of Photolithography Illumination System

This dataset contains the phase distribution of the random phase plate(RPP) which designed to eliminate the interference patterns caused by the coherence of the light source. The size of RPP is 25mm×25mm, the number of RPP is 50×50 and the pitches of RPP is 0.5mm×0.5mm.

搜集汇总

背景与挑战

背景概述

该数据集包含用于消除光刻照明系统中光源相干性干扰的随机相位板的相位分布数据。相位板尺寸为25mm×25mm，由50×50个单元组成，单元间距为0.5mm×0.5mm，适用于物理学领域，特别是光学相干性控制研究。