The scanning spreading resistance microscopy (SSRM) studies of heavy boron-doped diamond oxidation under high-temperature

The dataset contains the results of scanning spreading resistance microscopy (SSRM) of heavy boron-doped diamond (BDD) electrodes subjected to high-temperature oxidation in a furnace at 600 Celsius. The micrographs reveal the local change of electric properties at certainly crystallographic orientations of BDD grains and at the grain boundaries due to modification of surface termination in some cases followed by material decomposition. These and similar results were part of the studies described within the manuscript in Materials journal (10.3390/ma13040964) and in Ultramicroscopy journal (10.1016/j.ultramic.2019.01.004)