Reflection ptychography Siemens star soft X-ray dataset

The dataset contains raw data and Jupyter notebooks associated with our
research on reflection-geometry soft X-ray ptychography, as presented in
our paper. Through this imaging mode, we address the limitations of
traditional transmission geometries, which restrict the analysis of
thicker or bulk samples in the soft X-ray range. Our dataset includes
high-resolution images obtained from a lithographically defined Siemens
star and barcode test pattern on a multilayer substrate, demonstrating a
full-pitch resolution of ~45 nanometers confirmed through Fourier ring
correlation analysis. Additionally, this dataset contains the layout file
and Jupyter notebook used to simulate the anisotropic blurring of our
tilted resolution test sample as described in our paper. This dataset
provides a foundational resource for researchers interested in
nondestructive X-ray imaging techniques and extends the capabilities of
soft X-ray studies beyond the constraints of transmissive sample
preparation.