Multi-Modal MEMS Sensing Module for Extraterrestrial Oceanographic Exploration

With the discovery of extraterrestrial ocean environment, it is critical to develop unmanned vehicles with sensor payloads to explore the uncharted territory. The sensed data can be used to map the environment and seek signs of life. We present a design for a multi-modal sensing module consisting of 5 types of MEMS sensors integrated on a micro-swimming robot for extraterrestrial oceanographic exploration. The sensor module collects pressure, conductivity, temperature, pH, and biochemical data as the carrying robot traverses through the water body. In this paper, we discuss the design of the mentioned sensors on an AlGaN/GaN/Si wafer, as well as the fabrication and characterization of the conductivity, temperature, and pH sensors.