Data for: "Bringing Digital Illumination to the Microscopic Scale: Challenges and Trade-Offs"

This data was gathered and used to characterize a setup designed for maskless photo-lithography capable of additional structured light based functionality. The data set features.xlsx, .txt and .pptx files which includes characterization measurements of both the LED array and projected spot. Measurements of the photoresist and features created with it are also included. The power measurements were taken with an optical power meter and the film thickness and feature resolution was measured with a DekTak.