Aggregate data for the article "Characterizing the Field of Atomic Layer Deposition: authors, topics, and collaborations"

Aggregate data for the article "Characterizing the Field of Atomic Layer Deposition: authors, topics, and collaborations". The article explores the evolution of ALD research over time using bibliometric, network, and text analysis.<br><br>Fig 1. Number of papers and journals that publish ALD research, and percentage among SCIE papers and journals.<br>Fig 2. Number of distinct authors who publish ALD research, number of authors who publish ALD research for the first time, and ratio of new and distinct authors.<br>Fig 3. Average number of collaborators per author per year. <br>Fig 4. Number of nodes of the largest component of the ALD collaboration network; Relative size of the largest component; Average path length.<br>Fig 5. Evolution of component sizes of the ALD collaboration network over time. Variables: year, numberOfNodes (number of nodes of a component), numberOfComponents (number of components that have a particular size) and relativeSize.<br>Fig 7. Percentage of ALD papers containing a specific word pertaining to broad types of materials in their titles<br>Fig 8. Percentage of ALD papers containing a specific word pertaining to materials that are likely to be grown by ALD in their titles.<br>Fig 9. Percentage of ALD papers containing a specific word pertaining to substrate materials in their titles.<br>Fig 10. Percentage of ALD papers containing a specific word pertaining to applications of ALD in their titles.<br>Fig 11. Percentage of ALD papers containing a specific word pertaining to the type of study or process in their titles.<br>Fig 12. Percentage of ALD papers containing words that start with nano in their titles.<br>