Laser microscope profilometry of (Ce0.80Gd0.20)O1.90 after ∼3 μm surface finish

The dataset consists of a surface image and topography obtained using a Keyence VK-X1000 confocal laser microscope for (Ce0.80Gd0.20)O1.90 substrate (CGO-20). Imaging was performed to determine surface roughness. The Keyence VK-X1000 uses a 404 nm laser to map and measure the surface of samples via confocal scanning or a wide-field variable focus. The analyzied CGO-20 sample was round and had a diameter of ~13 mm. The results refer to a CGO-20 sample sintered at 1400 °C. The planar surfaces of the CGO pellets were polished using diamond suspensions (particle size ∼3 μm).