SEM Topography of UNCD with Sample Preparation by Simple Fracture
收藏DataCite Commons2024-05-01 更新2024-07-13 收录
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Ultracrystalline diamond surface was prepared using the method mentioned in the name of the digital surface twin. The manufacturer and some additional details can be found in the associated publication (see below).
Surface topography was measured on an SEM(Sigma VP, Zeiss, Oberkochen, Germany), using 13Kv and 7.5mm aperture and InLens SE2 detector. The sample was also plasma cleaned using an EM Kleen with an RF= 50 W, Pressure 45 mTorr, and 8min duration.
This data is associated with the following publication:
V. Chadha, N.C. Miller, R. Ding, K.E. Beschorner, T.D.B. Jacobs, Evaluating scanning electron microscopy for the measurement of small-scale topography. Surface Topography: Metrology and Properties, (2024)
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contact.engineering
创建时间：
2024-05-01
