Dataset for "Strain-driven dewetting and interdiffusion in SiGe thin films on SOI for CMOS-compatible nanostructures"
收藏Zenodo2025-06-21 更新2026-05-26 收录
下载链接：
https://zenodo.org/doi/10.5281/zenodo.15668189
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资源简介：
The dataset comprises a symmetrical geometry ω-2θ scan performed in triple-crystal mode aligned with the (004) peaks of the SiGe layer and Si device, and reciprocal space maps around the (004) and (224) peaks. AFM and SEM images are also included.
提供机构：
Zenodo
创建时间：
2025-06-21
