Reflection ptychography Siemens star soft X-ray dataset

The dataset contains raw data and Jupyter notebooks associated with our research on reflection-geometry soft X-ray ptychography, as presented in our paper. Through this imaging mode, we address the limitations of traditional transmission geometries, which restrict the analysis of thicker or bulk samples in the soft X-ray range. Our dataset includes high-resolution images obtained from a lithographically defined Siemens star and barcode test pattern on a multilayer substrate, demonstrating a full-pitch resolution of ~45 nanometers confirmed through Fourier ring correlation analysis. Additionally, this dataset contains the layout file and Jupyter notebook used to simulate the anisotropic blurring of our tilted resolution test sample as described in our paper. This dataset provides a foundational resource for researchers interested in nondestructive X-ray imaging techniques and extends the capabilities of soft X-ray studies beyond the constraints of transmissive sample preparation.
, , # Reflection ptychography Siemens star soft X-ray dataset

Dataset DOI: [10.5061/dryad.wpzgmsc39](https://doi.org/10.5061/dryad.wpzgmsc39)

## Description of the data and file structure

#### Overview

This repository contains the dataset associated with our research on reflection-geometry soft X-ray ptychography. The dataset includes raw imaging data and the reconstruction code used to analyze the data, the layout data for producing the patterned structure, and code to generate simulations of the anisotropic blurring observed in our work, facilitating further research and validation of our findings.

#### Files

* **siemens_reconstruction_publish.ipynb**: This Jupyter notebook contains the reconstruction code used for processing the raw data. The code provides step-by-step instructions for reconstructing images from the collected ptychographic raw data contained within **reflection_ptychography_dataset.stxm**.
* **reflection_ptychography_dataset.stxm**: This file contains the raw data ..., ,