Data for "A silicon spin vacuum: isotopically enriched $^{28}$silicon-on-insulator and $^{28}$silicon from ultra-high fluence ion implantation"

Data repository for the research article S. Q. Lim et al., "A silicon spin vacuum: isotopically enriched $^{28}$silicon-on-insulator and $^{28}$silicon from ultra-high fluence ion implantation", under review (2025).Authors: Shao Qi Lim, Brett C. Johnson, Sergey Rubanov, Nico Klingner, Bin Gong, Alexander M. Jakob, Danielle Holmes, David N. Jamieson, Jim S. Williams, and Jeffrey C. McCallum.Accepted for publication in Physical Review Materials 25 June 2025.Article DOI: https://doi.org/10.1103/787r-9jpsarXiv DOI: https://doi.org/10.48550/arXiv.2504.03332arXiv PDF: https://arxiv.org/pdf/2504.03332(data published online June 2025)