Experimental Interference Spectra of Thin Films

The dataset generated during this study consists of raw spectral interference signals collected via aspectrometer. Each data file contains two columns: the wavelength (nm) and the corresponding interference intensity (arbitrary units). The measurements cover a spectral range from 200 nm to 900 nm with a resolution of 1.5 nm. These data were used to identify local intensity features for calculating the thickness of SiO2 and PET thin films.