Dataset for publication "On unipolar and bipolar HiPIMS pulse configurations to enhance energy flux to insulating surfaces"

Name: Dataset for publication "On unipolar and bipolar HiPIMS pulse configurations to enhance energy flux to insulating surfaces"
Creator: University of West Bohemia
Published: 2024-12-05T00:00:00+08:00

Zenodo2024-12-05 更新2026-04-07 收录

高功率脉冲磁控溅射

薄膜沉积工艺模拟

数据链接：

https://zenodo.org/doi/10.5281/zenodo.14283037 数据链接链接失效反馈

官方服务：

资源简介：

Dataset for publication "On unipolar and bipolar HiPIMS pulse configurations to enhance energy flux to insulating surfaces"

提供机构：

University of West Bohemia

创建时间：

2024-12-05

Dataset for publication "On unipolar and bipolar HiPIMS pulse configurations to enhance energy flux to insulating surfaces"

资源简介：

相关数据集