A method to deposit a known number of polystyrene latex particles on a flat surface

This study introduces a method to deposit polystyrene latex (PSL) particles on a silicon wafer in a manner that allows their number to be predicted with a high degree of accuracy. A laminar flow growth tube is used to condense supersaturated water vapor on seed aerosol particles that are water-insoluble. After condensation is complete the droplets are accelerated through a nozzle to form an aerosol jet, and the number of droplets in this jet is counted optically. The droplets are then deposited on a flat surface by inertial impaction. The particle number on the surface is predicted by multiplying the droplet number by an experimentally evaluated conversion coefficient of 0.991 ± 0.011 (k = 2). Uncertainty analysis showed with a 95% confidence interval that the particle number on a flat surface is ± 2.0%. The primary application of this method is to make a particle number standard (PNS) wafer whose intended use is to evaluate the counting efficiencies of wafer surface scanners, and this study demonstrates the fabrication of such PNS wafers. A motorized XY-stage moves the surface horizontally to deposit PSL particles along desired paths over a half-inch wafer. The particle number was varied over seven levels ranging from 10 to 10,000. The particle diameter was varied at four levels: 0.814, 0.18, 0.102, and 0.046 µm. In all PNS wafers, the number of deposited particles was counted using optical microscopes. The observed particle numbers were all within the 95% confidence interval of the predicted value. Copyright © 2019 American Association for Aerosol Research