High-throughput XRR studies of catalytic direct bonding of hydrophilic Si wafers

This study investigates the impact of catalytic agents on the bonding process at hydrophilic silicon interfaces during low-temperature annealing.Traditionally, strong bonding at...本研究旨在探究低温退火过程中催化助剂对亲水硅界面键合过程的影响。传统上，强键合在……