Dataset for Low-loss SiGe waveguides for mid-infrared photonics fabricated on 200 mm wafers

This dataset contains the information contained in Figures 3, 4, 5 of the related manuscript. This research dataset should be interpreted and understood in the context of the corresponding manuscript, which has been published in Optics Express with DOI:. All relevant information regarding the dataset, how it was obtained and its context is contained in the manuscript. The data correspond to the information shown in the figures of the manuscript. 

Each file is in .txt format, the decimal separator is a point '.' and the column separator is a tab ';'.