Replication Data for: Scalable production of solid-immersion lenses for quant...

Data to replicate the experimental data plots in the paper: Fig. 1d, e: AFM scans of SIL before the etching and after the etching, possibility to see how the mask changed in the...本数据集用于复现该论文中的实验数据绘图：图1d、e为蚀刻前后SIL的原子力显微镜（Atomic Force Microscope，AFM）扫描图像，可用于观察掩模在……中的变化情况。