High-speed X-ray diffraction microscopy of operating hybrid Bulk and Surface Acoustic Waves (BAW/SAW) device

Exploiting X-ray diffraction microscopy (XDM), this proposal aims at extending our physical description of the wave behaviour in a novel hybrid Bulk / Surface Acoustic Wave (BAW/SAW) device. The expected comprehensive description will contribute to improve the understanding of the interaction between the BAW in the piezoelectric material and the SAW on the surface of the substrate. This in turn will help develop new high frequency, low loss resonators and filters for the next generation of telecommunication standards.本提案借助X射线衍射显微术（X-ray diffraction microscopy, XDM），旨在拓展我们对新型混合体声波/表面声波（Bulk / Surface Acoustic Wave, BAW/SAW）器件中波行为的物理描述。预期获得的全面描述将有助于加深对压电材料内体声波与衬底表面声波之间相互作用的理解，进而助力开发面向下一代通信标准的新型高频低损耗谐振器与滤波器。