5D-NP-FABTECH_ALD - Open Dataset for: "ZnO vapor phase infiltration into photo-patternable polyacrylate networks for the microfabrication of hybrid organic-inorganic structures"

This is the open dataset for the paper: "L. Demelius, L. Zhang, A. M. Coclite and M. D. Losego, ZnO vapor phase infiltration into photo-patternable polyacrylate networks for the microfabrication of hybrid organic–inorganic structures, Mater. Adv., 2024, 5, 8464–8474." This includes the supplementary information and all the source material that was used for the paper preparation. For each folder (sub-dataset), there exists a corresponding readme file describing the content and including material.