Data for Extreme Ultraviolet Metalens by Vacuum Guiding
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https://figshare.com/articles/dataset/Data_for_Extreme_Ultraviolet_Metalens_by_Vacuum_Guiding/22191457
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Data for Extreme Ultraviolet Metalens by Vacuum Guiding
M. Ossiander1, *, †, M. L. Meretska1, †, H. K. Hampel2, †, S. W. D. Lim1, N. Knefz2, T. Jauk2, F. Capasso1, *, M. Schultze2, *
1 John A. Paulson School of Engineering and Applied Sciences, Harvard University; Cambridge, MA 02138, USA.
2 Institute of Experimental Physics, Graz University of Technology; 8010 Graz, Austria.
* Corresponding Authors: mossiander@g.harvard.edu, capasso@seas.harvard.edu, schultze@tugraz.at
Manuscript published in Science 380, 59–63 (2023), https://science.org/doi/10.1126/science.adg6881
All data presented in the paper and supporting its claims is contained in this repository.
Data is saved in JSON format with descriptive variable names containing units where applicable and ordered by the figure panel it is presented in.
Additionally, raw SEM pictures and metasurface design files are included. To maintain a reasonable archive size usable on any computer, these are limited to 100 um optics diameter. The full 1000 um devices correspond exactly to these devices and use the same design mechanism for the outer optics parts.
Data presented in Fig. 1B and Fig. S1 is distributed with the IMD software package (D. L. Windt, IMD—Software for modeling the optical properties of multilayer films. Comput. Phys. 12, 360–370 (1998).).
创建时间：
2023-03-04
