Replication Data for: Lattice enhanced Fano resonances from bound states in the continuum metasurfaces

Fano resonances in metamaterials are known for their high quality (Q) factor and high sensitivity to external perturbations, which makes them attractive for sensors, lasers, non-linear and slow light devices. However, Fano resonances with higher Q factors obtained through structural optimization of individual resonators are accompanied by lower resonance intensity, thereby limiting the overall figure of merit (FoM) of the resonance. This article reports a strategy for simultaneously enhancing the Q factor and FoM of Fano resonances in terahertz metamaterials. Coupling of the Fano resonance, which arises from a symmetry protected bound state in continuum, to the first order lattice mode of the metamaterial array leads to stronger field confinement and substantial enhancement of both Q factor and FoM. As such enhancement occurs in planar metamaterials independently of the resonator geometry, the proposed approach can be utilized for a wide range of high-Q and high-sensitivity terahertz metadevices.