Measurement data of drawing dies

Tactile measured surface data from 72 cross-sections on a micro deep-drawing die, acquired with a 0.6 mm ball probe in scanning modus with 500 points/mm. Specified volumetric probing uncertainty P_{MPE} = 0.9 µm. The probing radius was corrected within the measurement Software QUINDOS before the data was exported.
Each line represents a measured point, containing its coordinates (X,Y,Z) as well as the direction of the probing vector (U,V,W) and the probe diameter (B), which is zero after the radius correction.