MILLING A MULTI-LAYERED OBJECT
收藏国家林业和草原科学数据中心2023-02-12 更新2024-03-07 收录
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资源简介：
A miller， a non-transitory computer readable medium， and a method for milling a multi-layered object. The method may include (i) receiving or determining milling parameters related to a milling process， the milling parameters may include at least two out of (a) a defocus strength， (b) a duration of the milling process， (c) a bias voltage supplied to an objective lens during the milling process， (d) an ion beam energy， and (e) an ion beam current density， and (ii) forming a crater by applying the milling process while maintaining the milling parameters， wherein the applying of the milling process includes directing a defocused ion beam on the multi-layered object.
提供机构：
国家林业和草原科学数据中心
创建时间：
2023-02-12
