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Design of a highly compact on-chip temperature sensor with UltraLow power based on 40nm CMO

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A fully integrated 0.0088𝑚𝑚2 temperature sensor in 40nm CMOS process is presented in this paper. The sensor generates temperature signal based on RC time constant, and following counter makes the temperature information available in a digital form. Measurement results show that the thermal sensor achieves a resolution of 0.43℃ from -40℃ to 85℃, resolution FOM of 0.28nJ* K2, while consuming 30μA from 1V supply voltage. It only takes 50μs to complete one measurement. The highly compact area and extremely low power consumption meet the temperature monitoring requirements for real-time monitoring of hot spots with little additional overhead.

创建时间:
2023-05-23
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