Low-Frequency Piezoresistive Accelerometer for Control Systems

The demand for compact and efficient accelerometers is growing exponentially because of their diverse applications in industries such as automotive, aerospace, consumer electronics, and healthcare. These small devices measure the force of acceleration, allowing the detection of motion, orientation and vibration. As technology advances, manufacturers are constantly striving to create smaller, more accurate accelerometers that can meet a wide variety of requirements. One of the problems associated with managing research tests of LPRE units involves obtaining accurate information about vibration modes, dynamic stability parameters, and dynamic overloads on nodes and power elements. The range of measurable acceleration is from 0±1 g to 0±10 g, and the frequency spectrum is 0–300 Hz. The internal error of the accelerometers must not exceed ±5%. This paper presents two designs of small-size accelerometers: the ultra-compact "SRAmicro" and the slightly larger, higher-accuracy "SRAHi−P re." Both accelerometers are designed to operate in frequency ranges of (0 ÷ 200) Hz and temperatures −50◦C − +180◦C. The SRAmicro model is ideal for applications with limited space, while the SRAHi−P re model offers higher accuracy for mission-critical applications. The paper discusses the structures, materials, and methods used to create and optimize these accelerometers. Experimental results indicate that the SRAHi−P re model, when combined with a thermal compensation circuit, significantly reduces the temperature sensitivity parameter (γ) and improves the overall performance of the device. These compact accelerometers have the potential to meet the increasing demands for diverse applications in various industries. (1985)