Enhancement of real-time resonance tracking in electro-thermally actuated cantilever sensor with optimized phase characteristic (Data)

Origin projects and figures used for the article "Enhancement of real-time resonance tracking in electro-thermally actuated cantilever sensor with optimized phase characteristic", published in the proceedings of the 29th Micromechanics and Microsystems Europe Workshop; 26.08.2018 to 29.08.2018; Smolenice Castle, Slovakia.