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Atomic force microscopy inside glovebox cluster (GBox-AFM2)

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DataCite Commons2024-04-24 更新2024-07-03 收录
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<p>The 2DCC Inert Atmosphere Cluster Tool enables the fabrication and characterization of air-sensitive van der Waals heterostructures and devices. It consists of three major pieces of instrumentation housed in two conjoined, argon gas-filled gloveboxes. The tool features a state-of-the-art transfer stage from HQ Graphene, an atomic force microscope from Asylum Research (MFP-3D Origin+) and a customized two-glovebox system from M. Braun, Inc, with integrated physical vapor deposition capabilities from Island e-Beam.</p><h6>Capabilities of AFM2 (GBox-AFM2)</h6><p>Characterization of air-sensitive van der Waals materials and thin films</p><ul><li><p>Accommodate large samples, up to 80mm diameter and up to 10mm thick</p></li><li><p>Modes: topography, KPFM, EFM, conductive AFM</p></li><li><p>Noise level &lt; 0.2 nm</p></li></ul><h6>Capabilities of two-box cluster (GBoxClust)</h6><p>Process air-sensitive van der Waals materials and thin films inside the glovebox</p><ul><li><p>Custom stands and mechanical connections to minimize vibration</p></li><li><p>Filled with argon gas with oxygen &lt; 0.1 PPM, water &lt; 0.1 PPM</p></li><li><p>Sample transfer through a vacuum suitcase</p></li><li><p>Exfoliation area</p></li><li><p>Hot plate</p></li></ul>

提供机构:
2D Crystal Consortium
创建时间:
2024-04-24
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