Replication Data for: Reconfigurable MEMS Fano metasurfaces with multiple-input-output states for logic operations at terahertz frequencies

A broad range of dynamic metasurfaces has been developed for manipulating the intensity, phase and wavefront of electromagnetic radiation from microwaves to optical frequencies. However, most of these metasurfaces operate in single-input-output state. Here, we experimentally demonstrate a reconfigurable MEMS Fano resonant metasurface possessing multiple-input-output (MIO) states that performs logic operations with two independently controlled electrical inputs and an optical read-out at terahertz frequencies. The far-field behaviour of Fano resonance exhibits XOR and XNOR operations, while the near-field resonant confinement enables the NAND operation. The MIO configuration resembling hysteresis type closed loop behaviour is realized through inducing electromechanically tuneable out-of-plane anisotropy in the near-field coupling of constituent resonator structures. The XOR metamaterial gate possesses potential applications in cryptographically secured terahertz wireless communication networks. Furthermore, the MIO features could lay the foundation for realization of programmable and randomly accessible metamaterials with enhanced electro-optical performance across terahertz, infrared and optical frequencies.