Dataset for the uncertainty assessment of confocal measurements of industrial samples

These original measurement data relate to the publication: J. Paredes, G. Kortaberria: Towards task-specific uncertainty assessment for imaging confocal microscopes, ICE23191.pdf (euspen.eu). Please refer to this open access publication for a detailed description of the measurement setup and procedure.
All data are in ASCII-format. Each file contains 2 columns, where they are the measured x/y and z-coordinates of the 2D profile extracted from the surface. All the coordinates are recorded in micrometers. The 0/90 at the end of the file names represent the orientation of the extracted profile being x and y direction respectively.
The topoghraphy files contain 3 columns, they are the measured x, y, and z-coordinates of the surface.
Acknowledgement
This project 20IND07 TracOptic has received funding from the EMPIR programme co-financed by the Participating States and from the European Union's Horizon 2020 research and innovation programme. Funder name: European Metrology Programme for Innovation and Research (EMPIR).