Data accompanying the publication: Near-infrared coherent Fourier scatterometry for deep subsurface nanostructure metrology in silicon

Authors (publication): Anubhav Paul, Mathijs Boonstra, Silvania F. Pereira<br>This dataset contains raw experimental data and MATLAB scripts used to reproduce key results in the associated publication “Near-infrared coherent Fourier scatterometry for deep subsurface nanostructure metrology in silicon”. It includes (i) raw optical spectra measured with an AQ6374 optical spectrum analyzer for both lasing and non-lasing operating conditions, and (ii) processed numerical data of spherical aberration (in units of λ) as a function of silicon wafer thickness. The accompanying MATLAB scripts generate the corresponding plots. The dataset is structured to support reproducibility and reuse, and may be useful for related research involving laser emission characterization and thickness-dependent aberration analysis in optical systems.