Tunable terahertz metasurface based on a modified Jerusalem cross

This work introduces a new terahertz metasurface based on a modified Jerusalem cross. The geometry of the basic structural element is modified, depending on its position in the matrix. The dimension change varies linearly in both orthogonal x and y directions, allowing for smooth resonant frequency tuning as a function of matrix position. The proposed layout enables the tuning of the resonant frequency within the range of 0.44–1.24 THz. The proposed structure consists of three layers: silicon, thin film silicon dioxide, and thin film aluminum. A numerical analysis is performed for the designed metasurface, followed by microtechnology-based fabrication and experimental validation of optimized terahertz metasurfaces. Good agreement of simulated and measured results is obtained. The proposed tunable structure may apply to the evaluation of thin dielectric films.