Dataset for Laser Material Processing with Tightly Focused Cylindrical Vector Beams

We demonstrate the modification of bulk and thin film materials, including silica glass, crystalline silicon and amorphous silicon, by tightly focused cylindrical vector beams with azimuthal and radial polarizations. The evidence of the longitudinal field is revealed by second harmonic generation in z-cut lithium niobate crystal. Despite the reduced threshold, modification of silicon materials in the center of the single pulse focused beam is not observed due to the enhanced reflection of longitudinal component at the interface of high-index-contrast media, proving that the longitudinal component of the tightly focused radially polarized beam is inefficient for the flat surface modification. Enhanced interaction of the longitudinal light field with silicon nanopillar structures generated after the first-pulse irradiation demonstrates that the multi-pulse regime should be implemented.