Data underlying the publication: Chemical vapor transformation of lithium carbonate during plasma-assisted ALD growth of lithium phosphate

The publication is focused on developing atomic layer deposition (ALD) processes for lithium carbonate (Li2CO3) and lithium phosphate (LiPO) with a novel lithium precursor, and understanding the surface reactions during the growth of LiPO thin films. Whereas the binary ALD cycle results in Li2CO3 films, the supercycle with trimethyl phosphate (TMPO) results in LiPO films that do not contain carbonate impurities. Therefore the reaction mechanism between TMPO and a Li2CO3 surface is investigated using time-resolved quadrupole mass spectrometry (QMS). The dataset contains raw spectroscopic ellipsometry (SE), x-ray photoelectron spectroscopy (XPS), x-ray diffraction (XRD) x-ray reflectometry (XRR), time-resolved QMS data, and the processed data.