Correlative electron microscopy-atom probe semiconductor datasets for benchmarking atom probe reconstruction
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下载链接：
https://doi.org/10.7910/DVN/FHEXDI
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资源简介：
This deposit includes a correlative ET and APT dataset of a SiGe multilayer structure, and a correlative electron microscopy and APT dataset of a SiGe finFET-like structure. The aim of this deposit is to provide correlative datasets for validation of APT reconstruction protocols and correlative methods. Data was obtained at imec.
创建时间：
2022-05-20
