Dataset for: ALD process-dependent fabrication of magnesium titanate thin film on a Si wafer
收藏Zenodo2026-04-24 更新2026-05-26 收录
下载链接：
https://zenodo.org/doi/10.5281/zenodo.19708960
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资源简介：
The dataset provides raw data collected and used for the analysis of the thin film properties within the scope of the paper article titled "Atomic layer deposition process-dependent fabrication of magnesium titanate thin film on a Si wafer".
提供机构：
Zenodo
创建时间：
2026-04-24
