Replication data for "Abrasive-free chemical-mechanical planarization (CMP) of gold for thin film nano-patterning"
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下载链接：
https://borealisdata.ca/dataset.xhtml?persistentId=doi:10.5683/SP3/60ZFJP
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资源简介：
Gherman, Raphael, 2024, "Replication data for "Abrasive-free chemical-mechanical planarization (CMP) of gold for thin film nano-patterning"", https://doi.org/10.5683/SP3/60ZFJP, Borealis, V1, UNF:6:kbzCJ8qzz9otKXiJGVkKjg== [fileUNF]
创建时间：
2024-06-24
