Coupling Silicon Lithography with Metal Casting-Data Set

Name: Coupling Silicon Lithography with Metal Casting-Data Set
Creator: Nicolet-Dit-Felix Kléber; Borasi Luciano; Frasca Simone; Mortensen Andreas; Charbon Edoardo
Published: 2022-06-24T00:00:00+08:00

Zenodo2022-06-24 更新2026-04-07 收录

硅基光刻工艺

金属铸造集成

数据链接：

https://zenodo.org/record/6641561 数据链接链接失效反馈

官方服务：

资源简介：

Dataset corresponding to the article Coupling Silicon Lithography with Metal Casting https://doi.org/10.1016/j.apmt.2022.101647

提供机构：

Nicolet-Dit-Felix Kléber; Borasi Luciano; Frasca Simone; Mortensen Andreas; Charbon Edoardo

创建时间：

2022-06-24

Coupling Silicon Lithography with Metal Casting-Data Set

资源简介：

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