ATLAS: A large array, on-chip compute SPAD camera for multispeckle diffuse correlation spectroscopy - Data

A 512 × 512 single-photon avalanche diode (SPAD) array with embedded autocorrelation computation, implemented in 3D-stacked CMOS technology, suitable for single-photon correlation spectroscopy applications including diffuse correlation spectroscopy (DCS).一款集成嵌入式自相关计算功能的512×512单光子雪崩二极管（single-photon avalanche diode, SPAD）阵列，采用3D堆叠互补金属氧化物半导体（3D-stacked CMOS）工艺制备，适用于单光子相关光谱类应用，其中包括漫反射相关光谱（diffuse correlation spectroscopy, DCS）。