A Genetic Algorithm for Model-Free X-ray Fluorescence Analysis of Thin Films

Single-layer films and multiple-layer films can be quantitatively analyzed using X-ray fluorescence. Due to
the
absence of adequate standards, most methods are based
on the calculation of theoretical X-ray fluorescence intensities from fundamental parameter methods. These methods require as initial estimates the exact qualitative
sample structure and accurate starting values for both
concentrations and layer thicknesses. This paper proposes a fundamental parameter method that uses a
genetic algorithm as an optimization procedure. The
relaxation of the requirements on the description of the
sample due to this robust optimization is discussed.
Preliminary results are presented indicating possible
applications as well as areas for further research.