FIB-SIMS depth profiling dataset: AlTiPt multilayer thin film (raw and pre-processed)

Two Tofwerk FIB-SIMS HDF5 datasets acquired from an aluminium-titanium-platinum (AlTiPt) multilayer thin film sample, provided as example data for the rsciio Tofwerk HDF5 reader and the eXSpy FIBSIMSSpectrum signal class. Both files contain the same acquisition: a positive-ion depth profile collected with a Tescan FIB at 30 kV / 1044 pA over a 20 µm field of view, 256×256 pixels (2×2 binned), 1301 depth slices, 3000 frames per slice, 11 µs dwell time. The mass range covers 1–216 Da. Acquisition was performed using TofDAQ v1.990759 with a Cronologic xTDC4 DAQ card. pfib_1301x128x128_AlTiPt_raw.h5 — raw file as produced by TofDAQ, containing the full EventList (ragged TDC timestamp arrays) and FIB SE images. No pre-integrated peak data. pfib_1301x128x128_AlTiPt.h5 — pre-processed file containing the same raw data plus a PeakData group with 216 nominal integer-mass peaks and one custom peak (¹⁹⁴Pt at 193.95 Da) pre-integrated by the TofDAQ software. These files are intended for use in testing, demonstration, and development of open-source FIB-SIMS analysis software, including eXSpy.