Dataset: Optical Fabrication and Characterisation of SU-8 Disk Photonic Waveguide Heterostructure Cavities

The difficulty of achieving reliable spectral and spatial overlap is a serious problem when fabricating photonic crystal (PhC) cavities around self-assembled quantum dots. We present a method for using photoresist to optically fabricate heterostructure cavities in a PhC waveguide with a combined photolithography and micro-photoluminescence spectroscopy system. We confirm the creation of cavity modes with high quality factors (mean = 3.8*10^3, maximum = 7.4(2)*10^3). This method offers a promising route towards bright, on-chip single photon sources for quantum information applications.